Electrical testing method of interposer

ABSTRACT

An interposer is provided which includes: a substrate having a first surface with a plurality of first conductive pads and a second surface opposite to the first surface, the second surface having a plurality of second conductive pads; a plurality of conductive through holes penetrating the first and second surfaces of the substrate and electrically connecting the first and second conductive pads; and a first removable electrical connection structure formed on the first surface and electrically connecting a portion of the first conductive pads so as to facilitate electrical testing of the interposer.

BACKGROUND OF THE INVENTION 1. Field of the Invention

The present invention relates to interposers and electrical testingmethods thereof, and, more particularly, to an interposer having aplurality of conductive through holes and an electrical testing methodthereof.

2. Description of Related Art

FIG. 1 shows a cross-sectional view of a conventional 3D-IC packagestructure. Referring to FIG. 1, an interposer 10 having a plurality ofcopper posts 11 penetrating therethrough is disposed between asemiconductor chip 12 and a packaging substrate 13 to serve as anelectrical connection bridge between the semiconductor chip 12 and thepackaging substrate 13.

The copper posts 11 are formed by filling a copper material in aplurality of through holes 100 in the interposer 10. However, if thethrough holes 100 are not completely filled with the copper material,voids or crevices 14 may occur in the copper posts 11. The voids orcrevices 14 cannot be inspected visually. Further, since the upper andlower surfaces of the interposer 10 have external conductive elementsdisposed thereon, a conventional wafer testing method cannot be used todetect the electrical performance of the interposer 10. Therefore, aneffective electrical testing method of the interposer 10 is required soas to improve the yield of the 3D-IC package structure.

SUMMARY OF THE INVENTION

Accordingly, the present invention provides an interposer, whichcomprises: a substrate having a first surface with a plurality of firstconductive pads and a second surface opposite to the first surface, thesecond surface having a plurality of second conductive pads; a pluralityof conductive through holes penetrating the first and second surfaces ofthe substrate and electrically connecting the first and secondconductive pads; and a first removable electrical connection structureformed on the first surface and electrically connected to a portion ofthe first conductive pads.

The present invention further provides an electrical testing method ofan interposer, which comprises the steps of: providing an interposer,having a substrate having a first surface with a plurality of firstconductive pads and a second surface opposite to the first surface, thesecond surface having a plurality of second conductive pads; a pluralityof conductive through holes penetrating the first and second surfaces ofthe substrate and electrically connecting the first and secondconductive pads; and a first removable electrical connection structureformed on the first surface and electrically connected to a portion ofthe first conductive pads; electrically connecting a plurality of probesto the interposer to test the interposer; and removing the firstremovable electrical connection structure.

A testing method of the interposer may be performed by complying a firstportion of the probes to a first portion of the second conductive padscorresponding in position to the first removable electrical connectionstructure, and coupling a second portion of the probes to a secondportion of the second conductive pads not corresponding in position tothe first removable electrical connection structure.

According to the present invention, by forming a removable electricalconnection structure on a surface of the interposer for electricallyconnecting a plurality of conductive pads on the surface, the conductivethrough holes in the interposer, the conductive pads on oppositesurfaces of the interposer and the removable electrical connectionstructure form a circuit for electrical testing, the electricalperformance of the conductive through holes. Thereafter, the removableelectrical connection structure is removed without adversely affectingthe interposer. Therefore, the present invention provides an effectiveelectrical testing method of the interposer without adversely affectingthe original design of the interposer.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a cross-sectional view showing a conventional 3D-IC packagestructure;

FIGS. 2A to 2K are cross-sectional views showing an electrical testingmethod of an interposer according to a first embodiment of the presentinvention, wherein FIG. 2H′ shows another embodiment of FIG. 2H;

FIG. 3 is a cross-sectional view showing an electrical testing method ofan interposer according to a second embodiment of the present invention;

FIG. 4 is a top view showing an electrical testing method of aninterposer according to a third embodiment of the present invention;

FIGS. 5A and 5B are cross-sectional and top views showing an electricaltesting method of an interposer according to a fourth embodiment of thepresent invention;

FIG. 6 is a cross-sectional view showing an electrical testing method ofan interposer according to a fifth embodiment of the present invention;and

FIGS. 7A and 7B are schematic cross-sectional views showing anelectrical testing method of an interposer according to a sixthembodiment of the present invention, wherein FIG. 7B shows anotherembodiment of FIG. 7A.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

The following illustrative embodiments are provided to illustrate thedisclosure of the present invention, these and other advantages andeffects can be apparent to those in the art after reading thisspecification.

It should be noted that the drawings are only for illustrative purposesand not intended to limit the present invention. Meanwhile, terms suchas “side,” “end,” “on,” “a,” etc. are only used as a matter ofdescriptive convenience and not intended to have any other significanceor provide limitations for the present invention.

FIGS. 2A to 2K are cross-sectional views showing an electrical testingmethod of an interposer according to a first embodiment of the presentinvention. FIG. 2H′ shows another embodiment of FIG. 2H.

Referring to FIG. 2A, an interposer is provided. The interposer has asubstrate 20 having opposite first and second surfaces 20 a, 20 b and aplurality of conductive through holes 21 formed therein. The firstsurface 20 a of the substrate 20 has at least a first redistributionlayer (RDL) 22 a. The outermost first redistribution layer 22 a has aplurality of first conductive pads 221 a electrically connected to theconductive through holes 21, and a UBM (Under Bump Metallurgy) layer 23a is further formed on the first conductive pads 221 a. An insulatinglayer 210 made of SiO₂ or SiN is formed between the substrate 20 andeach of the conductive through holes 21. The substrate 20 can be made ofsilicon or glass, and have a thickness less than or equal to 200 um,preferably less than 100 um. In addition, a first passivation layer 201a can be formed on the first surface 20 a of the substrate 20 and have aplurality of openings for exposing the conductive through holes 21. Thefirst surface 20 a can be connected to another substrate (not shown) andthe second surface 20 b can be connected to a semiconductor chip (notshown), or vice versa.

Referring to FIG. 2B, a metal layer 24 is formed on the first surface 20a and the UBM layer 23 a by sputtering. In the present embodiment, onlyone metal layer is provided. In other embodiments, a plurality of metallayers 24 can be provided and made of the same or different materials.The metal layer 24 can be made of Al, Ni, NiV, W, Ti, TiW, Cr, Ta, Au orCu.

Referring to FIG. 2C, a positive or negative photoresist layer is formedon the metal layer 24, and exposed and developed so as to be formed as apatterned resist layer 25. In the present embodiment, the patternedresist layer 25 is formed between two adjacent first conductive pads 221a for covering the metal layer 24 between the two first conductive pads221 a while exposing other regions.

Referring to FIG. 2D, by using the patterned resist layer 25 as a mask,the metal layer 24 exposed from the patterned resist layer 25 is removedby dry etching or wet etching and a first removable electricalconnection structure 241 a is formed for electrically connecting aportion of the first conductive pads 221 a with the conductive throughholes 21. Then, the patterned resist layer 25 is removed. In the presentembodiment, the first removable electrical connection structure 241 a isformed on the first UBM layer 23 a of the first conductive pads 221 aand made of a material different from that of the first UBM layer 23 a,and, after a subsequent electrical test is performed, the firstremovable electrical connection structure 241 a can be removed throughselective etching. Alternatively, the first removable electricalconnection structure 241 a can be directly formed on two adjacent firstconductive pads 221 a and electrically connecting the two firstconductive pads 221 a.

Referring to FIG. 2E, the first surface 20 a of the substrate 20 havingthe first removable electrical connection structure 241 a is mounted ona carrier 27 through an adhesive layer 26. The carrier 27 can be anadhesive tape having a frame, or a metal plate or glass having anadhesive layer.

Referring to FIG. 2F, a portion of the substrate 20 is removed from thesecond surface 20 b by grinding or etching, thereby exposing the ends ofthe conductive through holes 21. In the present embodiment, the secondsurface 20 b is ground to be in a certain thickness without exposing theconductive through holes 21, and then an etching process is performed toexpose the conductive through holes 20.

Referring to FIG. 2G, a second passivation layer 201 b is formed tocover the second surface 20 b and has a plurality of openings forexposing the conductive through holes 21. The second passivation layer201 b can be made of SiO₂ or SiN. Then, a second UBM layer 23 b isformed in each of the openings of the second passivation layer 201 b forelectrically connecting the corresponding conductive through hole 21.Alternatively, a redistribution layer and a plurality of conductive padscan be formed on the second surface 20 b, and the second UBM layer 23 bcan be formed on the conductive pads. The second UBM layer 23 b can bemade of Al, Ni, NiV, W, Ti, TiW, Cr, Ta, Au or Cu. A plurality ofconductive bumps 28 are formed on the second UBM layer 23 b by printing,electroplating or ball mounting. In other embodiments, each of theconductive bumps 28 has a copper post disposed on the second UBM layer23 b and a solder layer disposed on the copper post.

Referring to FIG. 2H, the interposer is tested through the firstremovable electrical connection structure 241 a. In particular, twoprobes 29 are connected to the conductive bumps 28 corresponding inposition to the first removable electrical connection structure 241 a,and an electrical test can be performed to determine the electricalconductivity between the two probes 29. The conductive bumps 28, theconductive through holes 21 and the first removable electricalconnection structure 241 a form a circuit. If no crevice or void occursin the conductive through holes 21, the circuit allows currents to flowtherethrough. As such, the electrical performance of the two conductivethrough holes 21 in the circuit can be determined by measuring thecurrents between the two conductive bumps 28. On the other hand, if avoid or crevice occurs in the conductive through holes 21 and thecircuit is broken, currents cannot flow through the circuit. As such, nocurrent is measured between the two conductive bumps 28, and theinterposer can be determined to be defective. Similarly, in order totest whether a short circuit or current leakage occurs in theinterposer, one of the probes 29 is connected to a conductive bump 28that corresponds in position to the first removable electricalconnection structure 241 a, and another probe 29 is connected to aconductive bump 28 that does not correspond in position to the firstremovable electrical connection structure 241 a. Since theabove-described two conductive bumps 28 are not electrically connectedto each other through the first removable electrical connectionstructure 241 a, the circuit should be open. By testing the electricalconductivity between the two probes 29, it can be determined whether ashort circuit or current leakage occurs between the two conductive bumps28, as shown in FIG. 2H′.

Referring to FIG. 2I, the second surface of the interposer is mounted ona carrier 30. In the present embodiment, the carrier 30 can be anadhesive tape having a frame, and the adhesive tape can be removed by UVlight or heat treatment.

Referring to FIG. 2J, the carrier 27 and the adhesive layer 26 areremoved. By removing the adhesive property of the adhesive layer 26through UV light or heat treatment or removing the adhesive layer 26with a solvent, the carrier 27 can be removed. After the carrier 27 isremoved, the surface of the interposer can be cleaned by using a solventor plasma.

Referring to FIG. 2K, the first removable electrical connectionstructure 241 a and the carrier 30 are removed. In the presentembodiment, the first removable electrical connection structure 241 a ismade of Al and the first UBM layer 23 a is made of Ti/Cu. By performinga dry etching using BCl₃ gas, the first removable electrical connectionstructure 241 a made of Al is removed without adversely affecting theUBM layer 23 a made of Ti/Cu. In other embodiments, different materialsand different removing methods can be applied. Through theabove-described processes, an interposer such as a through siliconinterposer (TSI) is obtained. Referring to FIG. 3, in anotherembodiment, the first surface 20 a can have a plurality of firstredistribution layers 22 a, and the second surfaces 20 b can have aplurality of second redistribution layers 22 b.

FIG. 4 shows an electrical testing method of an interposer according toa third embodiment of the present invention. The first surface 20 a ofthe substrate 20 further has at least a testing pad 2211 electricallyconnected to one of the first conductive pads 221 a through a circuit2411 a. Alternatively, the testing pad 2211 can be disposed on thesecond surface 20 b. To perform an electrical test, a probe 29 can beconnected to the testing pad 2211 instead of the corresponding firstconductive pad 221 a, thereby protecting the surface of the firstconductive pad 221 a from being damaged by the probe 29 so as to ensurethe product reliability.

FIGS. 5A and 5B are schematic cross-sectional and top views of anelectrical testing method of an interposer according to a fourthembodiment of the present invention.

The fourth embodiment differs from the second embodiment in that asecond removable electrical connection structure 241 b is formed on thesecond surface 20 b and electrically connected to a portion of thesecond UBM layer 23 b. The first and second conductive pads 221 a, 221b, the first and second removable electrical connection structures 241a, 241 b, and the conductive through holes 21 form a daisy chainstructure. By measuring the impedance of the daisy chain structure, thepresent invention can determine whether the interposer has defectiveconductive through holes that lead to increase of the impedance value.

FIG. 6 shows an electrical testing method of an interposer according toa fifth embodiment of the present invention. The fifth embodimentdiffers from the fourth embodiment in that two probes 29′ are connectedin series to replace the second removable electrical connectionstructure 241 b of the fourth embodiment, and the first and secondconductive pads 221 a, 221 b, the conductive through holes 21, the firstremovable electrical connection structure 241 a, and the probes 29′ forma daisy chain structure. In other embodiments, the probes 29, 29′ can bedesigned as a general purpose testing board in which a portion of probesor test pads are electrically connected to each other so as to form adaisy chain structure together with the conductive through holes 21 andthe first removal electrical connection structure 241 a.

FIGS. 7A and 7B are schematic cross-sectional views showing anelectrical testing method of an interposer according to a sixthembodiment of the present invention. FIG. 7B shows another embodiment ofFIG. 7A.

The sixth embodiment differs from the second embodiment in that thefirst removable electrical connection structure 241 a and the UBM layer23 a are integrally formed in the present embodiment, as shown in FIG.7A. Alternatively, the first and second removable electrical connectionstructures 241 a, 241 b are integrally formed with the first and secondUBM layers 23 a, 23 b, respectively, as shown in FIG. 7B.

In an embodiment, the first removable electrical connection structure241 a and the second removable electrical connection structure 241 b canbe integrally formed with the first redistribution 22 a and the secondredistribution 22 b, respectively.

The present invention further provides an interposer, which has: asubstrate 20 having a first surface 20 a with a plurality of firstconductive pads 221 a and a second surface 20 b opposite to the firstsurface 20 a and having a plurality of second conductive pads 221 b; aplurality of conductive through holes 21 penetrating the first andsecond surfaces 20 a, 20 b of the substrate 20 so as to electricallyconnect the first and second conductive pads 221 a, 221 b; and a firstremovable electrical connection structure 241 a formed on the firstsurface 20 a and electrically connected to a portion of the firstconductive pads 221 a.

In the above-described interposer, the first removable electricalconnection structure 241 a can be integrally formed with the firstconductive pads 221 a. Alternatively, the first removable electricalconnection structure 241 a is a metal layer 24 or a wiring layer formedon the first conductive pads 221 a and the first surface 20 a.

In the above-described interposer, the first conductive pads 221 a canfurther have a first UBM (Under Bump Metallurgy) layer 23 a formedthereon, and the second conductive pads 221 b can further have a secondUBM layer 23 b formed thereon. The first removable electrical connectionstructure 241 a is interposed between the first conductive pads 221 aand the first UBM layer 23 a. The second removable electrical connectionstructure 241 b is interposed between the second conductive pads 221 band the second UBM layer 23 b.

In the above-described interposer, the first surface 20 a can have atleast a first redistribution layer 22 a, and the second surface 20 b canhave at least a second redistribution layer 22 b. The outermost firstredistribution layer 22 a and the outermost second redistribution layer22 b have the first conductive pads 221 a and the second conductive pads221 b, respectively.

In the above-described interposer, the first surface 20 a can furtherhave at least a testing pad 2211 electrically connected to one of thefirst conductive pads 221 a through a circuit 2411 a. The interposer canfurther have a second removable electrical connection structure 241 bformed between a portion of the second conductive pads 221 b, and thefirst conductive pads 221 a, the second conductive pads 221 b, the firstremovable electrical connection structure 241 a, the second removableelectrical connection structure 241 b, and the conductive through holes21 form a daisy chain structure.

The interposer can further have a plurality of conductive bumps 28disposed on the second conductive pads 221 b. The substrate 20 can havea thickness less than or equal to 200 um.

According to the present invention, by forming a removable electricalconnection structure on a surface of the interposer for electricallyconnecting a plurality of conductive pads on the surface, the conductivethrough holes in the interposer, the conductive pads on oppositesurfaces of the interposer and the removable electrical connectionstructure form a circuit for electrical testing, thereby determining theelectrical performance of the conductive through holes. Thereafter, theremovable electrical connection structure is removed without adverselyaffecting the interposer. Therefore, the present invention provides aneffective electrical testing method of the interposer, without adverselyaffecting the original design of the interposer.

The above-described descriptions of the detailed embodiments are only toillustrate the preferred implementation according to the presentinvention, and it is not to limit the scope of the present invention.Accordingly, all modifications and variations completed by those withordinary skill in the art should fall within the scope of presentinvention defined by the appended claims.

1-9. (canceled)
 10. An electrical testing method of an interposer,comprising the steps of: providing an interposer, the interposercomprising: a substrate having a first surface with a plurality of firstconductive pads and a second surface opposite to the first surface, thesecond surface having a plurality of second conductive pads; a pluralityof conductive through holes penetrating the first and second surfaces ofthe substrate and electrically connecting the first and secondconductive pads; and a first removable electrical connection structureformed on the first surface and electrically connecting a portion of thefirst conductive pads; electrically connecting a plurality of probes tothe interposer to test the interposer; and removing the first removableelectrical connection structure.
 11. The electrical testing method ofclaim 10, wherein the first removable electrical connection structure isintegrally formed with the first conductive pads.
 12. The electricaltesting method of claim 10, wherein the first removable electricalconnection structure is a metal layer or a wiring layer formed on thefirst conductive pads and the first surface.
 13. The electrical testingmethod of claim 10, after testing the interposer, further comprisingmounting the second surface of the interposer on a carrier.
 14. Theelectrical testing method of claim 10, further comprising mounting theinterposer on a carrier via the first surface thereof, and removing thecarrier before removing the first removable electrical connectionstructure.
 15. The electrical testing method of claim 10, wherein thefirst conductive pads further have a first UBM layer formed thereon andthe second conductive pads further have a second UBM layer formedthereon, such that the first removable electrical connection structureis interposed between the first conductive pads and the first UBM layer,and a second removable electrical connection structure is interposedbetween the second conductive pads and the second UBM layer.
 16. Theelectrical testing method of claim 10, wherein the first surface furtherhas at least a first redistribution layer, and the second surfacefurther has at least a second redistribution layer.
 17. The electricaltesting method of claim 10, wherein the probes are connected to thesecond conductive pads corresponding to the first removable electricalconnection structure.
 18. The electrical testing method of claim 10,wherein a first portion of the probes are coupled to a first portion ofthe second conductive pads corresponding in position to the firstremovable electrical connection structure, and a second portion of theprobes are coupled to a second portion of the second conductive pads notcorresponding in position to the first removable electrical connectionstructure.
 19. The electrical testing method of claim 10, wherein thefirst surface further has at least a testing pad electrically connectedto one of the first conductive pads.
 20. The electrical testing methodof claim 10, further comprising forming a second removable electricalconnection structure between a portion of the second conductive pads andthe first and second conductive pads, the first and second removableelectrical connection structures and the conductive through holes toform a daisy chain structure.
 21. The electrical testing method of claim10, wherein a portion of the probes are connected in series, and thefirst and second conductive pads, the first removal electricalconnection structure, the conductive through holes and the probes areformed as a daisy chain structure.
 22. The electrical testing method ofclaim 10, before testing the interposer, further comprising forming aplurality of conductive bumps on the second conductive pads.
 23. Theelectrical testing method of claim 10, wherein the substrate is lessthan or equal to 200 um in thickness.